Abstract




 
   

IJE TRANSACTIONS A: Basics Vol. 31, No. 1 (January 2018) 96-103   

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  QUALITY FACTOR OF FREE IN-PLANE VIBRATION OF A FULLY CLAMPED RECTANGULAR MICRO-PLATE
 
S. Najafi, S. Dowlati, G. Rezazadeh and S. Azizi
 
( Received: October 24, 2017 – Accepted in Revised Form: December 21, 2017 )
 
 

Abstract    Thermo-elastic damping is a significant dissipation mechanism in high quality factor microstructures. In this paper, thermo-elastic damping of the in-plane vibration of fully clamped rectangular micro-plates has been studied. The governing equation of the micro-plate motion and heat conduction equation were derived. Then, The Galerkin method has been used to solve the coupled heat-displacement equations. Eventually, considering the micro-plate of various materials, the effects of geometrical parameters including the length and width of micro-plate and also ambient temperature on the thermo-elastic damping quality factor have been investigated.

 

Keywords    In-plane vibration, Thermo-elastic damping, Quality factor, rectangular micro-plate.

 

چکیده    میرایی ترموالاستیک ، مکانیزم اتلافی قابل توجهی در میکروساختارهایی با فاکتور کیفیت بالا است. این مقاله میرایی ترموالاستیک ارتعاشات درون صفحهای را در میکروصفحه مستطیلی کاملا گیردار مورد مطالعه قرار میدهد. ‌معادله ‌حاکم ‌بر ارتعاشات ‌ميکروصفحه مستطیلی و معادله هدایت حرارتی استخراج و روش گلرکین برای حل معادلات کوپل شده بکار گرفته شدهاست. سپس، برای میکروصفحات مسطتیلی از جنسهای مختلف، اثر ابعاد شامل طول و عرض و همچنین اثر دمای محیط بر فاکتور کیفیت مورد بررسی قرار گرفتهاست.

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