IJE TRANSACTIONS B: Applications Vol. 31, No. 2 (February 2018) 293-299    Article in Press

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A. Gharehkhani and E. Abbaspour-Sani
( Received: June 11, 2017 – Accepted: December 21, 2017 )

Abstract    In this paper a new design for 6 bit DMTL phase shifter with only 32 MEMS switches is proposed. The reduction in number of switches in ordinary 6 bit phase shifter from 63 to 32 is due to combination of one 5.625 degree for least significant bit and 11.25 degree for the rest of the switches. Decreasing the number of the switches reduces the die-size as well as loss of the CPW line. Analytical study and simulation with HFSS and COMSOL software is carried out for the proposed structure. Maximum return loss of phase shifter is -10.5 dB and mean RMS phase error is 1.4o . Although two different structural switches are used but the pull in voltages are identical. The total structure size is 1.5*18.5 mm2 , and surface micromachining process is proposed for the phase shifter.


Keywords    MEMS, shunt capacitive switch, DMT phase shifter, actuation voltage


چکیده    در این مقاله ما ساختاری جدید از یک شیفت دهنده فاز شش بیتی DMTL ارائه می دهیم که فقط 32 سوئیچ MEMS در آن به کار رفته است. کاهش تعداد سوئیچ های شیفت دهنده فاز شش بیتی از 63 به 32، با توجه به ترکیبی از یک سوئیچ متفاوت در بیت اول جهت شیفت فاز 5.625 درجه و 31 سوئیچ همسان دیگر با قابلیت شیفت فازهای 11.25 درجه برای دیگر بیت ها، صورت می پذیرد. کاهش تعداد سوئیچ ها سبب کاهش اندازه شیفت دهنده فاز و در نتیجه کاهش تلفات خط CPW می شود. با استفاده از نرم افزارهای COMSOL و HFSS ، مطالعه تحلیلی و شبیه سازی ساختار پیشنهادی صورت گرفته است. بر اساس نتایج، ماکزیمم تلفات بازگشتی شیفت دهنده فاز-10.5 dB و میانگین خطای RMS برابر 1.4 درجه است. با وجود داشتن دو نوع سوئیچ با ساختار متفاوت، ولتاژ عملگر برای تمامی سوئیچ ها یکسان است. اندازه کلی ساختار 18.5*1.5 میلیمتر مربع بوده و پروسه میکروماشین کاری سطحی برای شیفت دهنده فاز ارائه شده پیشنهاد شده است.

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